Spin-current switched magnetic memory element suitable for circuit integration and method of fabricating the memory element

ABSTRACT

A method of fabricating a spin-current switched magnetic memory element includes providing a wafer having a bottom electrode, forming a plurality of layers, such that interfaces between the plurality of layers are formed in situ, in which the plurality of layers includes a plurality of magnetic layers, at least one of the plurality of magnetic layers having a perpendicular magnetic anisotropy component and including a current-switchable magnetic moment, and at least one barrier layer formed adjacent to the plurality of magnetic layers, lithographically defining a pillar structure from the plurality of layers, and forming a top electrode on the pillar structure.

RELATED APPLICATIONS

This Application is a Divisional Application of U.S. patent applicationSer. No. 12/548,428 filed on Aug. 27, 2009, which was a DivisionalApplication of U.S. patent application Ser. No. 10/715,376 filed on Nov.19, 2003, the entire contents of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a spin-current switched magnetic memoryelement having a plurality of layers (e.g., magnetic layers) and amethod of fabricating the memory element, and more particularly, to aspin-current switched magnetic memory element including a plurality oflayers, in which at least one of the magnetic layers has a perpendicularmagnetic anisotropy component. The memory element has the switchingthreshold current and device impedance suitable for integration withcomplementary metal oxide semiconductor (CMOS) integrated circuits.

2. Description of the Related Art

Spin-current injection switches represent a new class of memory devicesthat can be scaled down to the size of at least about 10 nm. Thesedevices use spin polarized current injection to switch magnetic bits.

There is an intense search for a two terminal current-switchablespin-valve or magnetic tunneling-based device for memory applications.If such devices can be found with adequate switching current for writingand proper impedance and signal level for reading, it will bringpossibilities for a new architecture to magnetic random access memory(MRAM).

For a thin film nanomagnet memory element, the threshold currentnecessary to induce such a switch is directly proportional to thecombined magnetic anisotropy (4πMs+H), where 4πMs is the easy-planeshape anisotropy, and H represents the additional uniaxial anisotropyand/or applied magnetic field.

However, the experimentally demonstrated threshold current for a thinfilm nanomagnet of 60 nm×120 nm×2 nm is about 1 mA. This requiredcurrent is too high (e.g., by at least an order of magnitude) forsuccessful insertion of these devices into current-generationcomplementary metal oxide semiconductor (CMOS) circuits.

In addition, to date all spin transfer-switching devices use themetal-based current perpendicular (CPP) spin valve structure, which hastoo low an impedance for fast read-out using a CMOS-based circuit.Magnetic tunneling junctions will have higher impedances that can becompatible with CMOS requirements. However, to date no cleardemonstration has been made that such spin-transfer-based magneticswitching exists in magnetic tunneling junctions. This is because of twofactors.

First, the normal, magnetization-in-plane magnetic film has too large aneasy-plane de-magnetization field (e.g., on the order of 1.8 Tesla forcobalt, for example), which causes the switching current density to betoo high (e.g., on the order of 10⁷ A/c m²), as measured using aspin-valve type of switches, which has been demonstrated by theinventors as well as others. Secondly, the breakdown current density istoo low in magnetic tunneling devices, typically below 10⁵ A/cm², forsuccessful combination of a tunneling device with a spin-transferswitch.

Thus, two terminal current-switchable spin-valve or magnetictunneling-based devices have not been efficiently and effectively usedfor conventional magnetic memory applications.

SUMMARY OF THE INVENTION

In view of the foregoing and other exemplary problems, disadvantages,and drawbacks of the aforementioned systems and methods, it is a purposeof the exemplary aspects of the present invention to provide aspin-current switched magnetic memory element (e.g., a spin-currentinjection device) having a reduced switching current threshold and anincreased device impedance, and a method of fabricating the memoryelement.

An exemplary aspect of the present invention includes a magnetic memoryelement which is switchable by current injection. The memory elementincludes a plurality of magnetic layers, at least one of the pluralityof magnetic layers having a perpendicular component of magneticanisotropy (e.g., a perpendicular magnetic anisotropy component) andincluding a current-switchable magnetic moment, and at least one barrierlayer formed adjacent to the plurality of magnetic layers (e.g., betweentwo magnetic layers). The memory element has the switching thresholdcurrent and device impedance suitable for integration with complementarymetal oxide semiconductor (CMOS) integrated circuits.

The plurality of magnetic layers may include at least one compositelayer. For example, the at least one composite layer may include aplatinum layer and a cobalt layer. The at least one composite layer mayalso include a gold layer and a cobalt layer, or a nickel layer and acopper layer.

Further, the perpendicular magnetic anisotropy component may be formedbetween layers in at least one composite layer. The perpendicularmagnetic anisotropy component may also include a bulk perpendicularmagnetic anisotropy component of intrinsic material or magnetoelasticorigin which may be formed in the at least one composite layer.

The memory element may also include first and second leads, and a pillarformed between the first and second leads, the pillar including the atleast one barrier layer and at least one magnetic layer of the pluralityof magnetic layers. Further, the at least one magnetic layer included inthe pillar may include the current-switchable magnetic moment. Inaddition, the magnetic moment of the at least one magnetic layerincluded in the pillar may be switchable by an electrical current havinga density of no more than about 10⁶ A/cm². In addition, at least one ofthe first and second leads may include a magnetic layer of the pluralityof magnetic layers.

The pillar may include a lithographed pillar having a diameter of lessthan about 100 nm. The pillar may also include an oblong-shaped (e.g.,oval-shaped) cross section. The pillar may have an electrical resistancewhich depends on a magnetization direction of the lower magnetic layerwith respect to a magnetization direction of the upper layer. Forexample, the barrier may be a tunneling barrier, in which case thepillar may include a magnetic tunneling junction across the barrierlayer between the upper and lower magnetic layers.

The barrier may also be a non-magnetic metallic conductor such ascopper, in which case the pillar may include a current-perpendicularspin-valve structure between the upper and lower magnetic layers. Thebarrier may also be a non-magnetic semiconductor or a dopedsemiconductor or insulator such as SrTiO₃ which by chemical substitution(e.g., Nb) can become metallic. In such a case the pillar may include aferromagnet-semiconductor-ferromagnet junction.

A function of the barrier layer may include preserving spin informationfor an electric current injected into the pillar and providing aresistance (e.g., a sufficient resistance) to the current. The barriermay be a composite layer formed by more than one material and/or layers.The barrier layer may also be alternately formed with the plurality ofmagnetic layers.

Specifically, the barrier layer may include a tunneling barrier layer.The tunneling barrier layer may include one of aluminum oxide andmagnesium oxide or a composite of both.

The plurality of magnetic layers may include an upper magnetic layer anda lower magnetic layer, the at least one barrier layer being formedbetween the upper and lower magnetic layers. The perpendicular magneticanistropy may have a magnitude sufficient to at least substantiallyoffset the easy-plane demagnetization effect, such that a magneticmoment of one of the upper and lower magnetic layers may be eitherresting out of the film plane or can be easily rotated out of the filmplane under spin current excitation.

The upper magnetic layer may include one of a platinum layer formed on acobalt layer, and a gold layer formed on a cobalt layer. The lowermagnetic layer may include one of a cobalt layer formed on a platinumlayer, a cobalt layer formed on a gold layer, and a nickel layer formedon a copper layer.

Further, the lower magnetic layer may include a first nickel layerformed on a first copper layer, and the upper magnetic layer may includea second copper layer formed on a second nickel layer. The second nickellayer may have a thickness which is less than a thickness of the firstnickel layer, and may have a magnetic moment which is perpendicular to afilm plane.

Further, the second nickel layer may have a magnetic momentcorresponding to an information state of the spin-current switchedmagnetic memory element. The lower magnetic layer may also include afirst cobalt layer formed on a first platinum layer, and the uppermagnetic layer may include a second platinum layer formed on a secondcobalt layer.

In another exemplary aspect, the present invention includes aspin-current switched magnetic memory element, having first and secondleads, a pillar formed between the first and second leads, a pluralityof magnetic layers, at least one of the plurality of magnetic layershaving a perpendicular magnetic anisotropy component and including acurrent-switchable magnetic moment, and being formed in the pillar, andat least one barrier layer formed adjacent to the plurality of magneticlayers (e.g., between two of the magnetic layers).

The spin-current switched magnetic memory element may further includemore than one barrier layer. For example, it may have one non-magneticmetal layer (e.g., a copper layer) formed adjacent to the plurality ofmagnetic layers. Thus, for example, the plurality of magnetic layers mayinclude a first magnetic layer formed on the first lead, the at leastone barrier layer being formed on the first magnetic layer, a secondmagnetic layer formed on the at least one barrier layer, the at leastone non-magnetic metal layer being formed on the second magnetic layer,and a third magnetic layer formed on the non-magnetic metal layer, thesecond lead being formed on the third magnetic layer.

Another exemplary aspect of the present invention includes a magneticrandom access memory (MRAM) array including a plurality of magneticspin-current switched magnetic memory elements according to the presentinvention.

Another exemplary aspect of the present invention includes a method offabricating a spin-current switched magnetic memory element. The methodincludes forming a plurality of layers which includes a plurality ofmagnetic layers, the plurality of magnetic layers including at least onemagnetic layer having a perpendicular magnetic anisotropy component andincluding a current-switchable magnetic moment, and at least one barrierlayer formed adjacent to the plurality of magnetic layers (e.g., betweentwo of the magnetic layers).

With its unique and novel features, the present invention provides amagnetic memory element (e.g., a spin-current injection tunnelingdevice) having a switching current threshold which is lower than that ofpresent-day spin-transfer-based memory elements, and an impedancedesirable for CMOS circuit integration, and a method of fabricating themagnetic memory element.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing and other exemplary purposes, features, aspects andadvantages will be better understood from the following detaileddescription of the exemplary embodiments of the invention with referenceto the drawings, in which:

FIG. 1A-1F illustrate a spin-current switched magnetic memory element100, in accordance with an exemplary aspect of the present invention;

FIGS. 2A-2B illustrate a spin-current switched magnetic memory element200, in accordance with an exemplary aspect of the present invention;

FIG. 3 illustrates a graph plotting magnetic rotation (as measured bypolar Kerr signal) corresponding to the reversal of perpendicularmagnetization in a plurality of layers consisting of 100 Å Pt/5 Å Co/10Å Pt/15 Å Co/50 Å Au arrangement (e.g., a thin film stack), according toan exemplary aspect of the present invention.

FIG. 4 illustrates a spin-current switched magnetic memory element 400,in accordance with an exemplary aspect of the present invention; and

FIG. 5 illustrates method 500 for fabricating a spin-current switchedmagnetic memory element, in accordance with an exemplary aspect of thepresent invention.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS OF THE INVENTION

Referring now to the drawings, FIGS. 1A-1F, 2A-2B and 4 illustrate anexemplary aspect of the present invention. Specifically, these figuresillustrate a magnetic memory element (e.g., a current-switchabletwo-terminal magnetic memory element) which may be included, forexample, as part of a magnetic random access memory (MRAM) array.

A device having a magnetic layer with current-switchable magnetic momentis described, for example, in U.S. Pat. No. 5,695,864, entitled“ELECTRONIC DEVICE USING MAGNETIC COMPONENTS”, and a thin filmmagneto-resistive device is described, for example, in U.S. Pat. No.5,792,569, entitled “MAGNETIC DEVICES AND SENSORS BASED ON PEROVSKITEMANGANESE OXIDE MATERIALS”, which are assigned to the present Assigneeand are incorporated by reference herein.

The exemplary aspects of the present invention make use of aperpendicular component of magnetic anisotropy (e.g., a perpendicularmagnetic anisotropy component) for the creation of a magnetic state thatis more favorable for low-current switching. The perpendicularanisotropy component may counter the demagnetization field of a magneticlayer (e.g., the switching, or “free” layer, or the fixed, or “pinned”reference magnetic layers, or both) of the magnetic layers that form thethin film switching element), making the magnetic anisotropy which isuseful for memory functions the only significant energy barrier that aspin-current switch has to overcome.

As shown in FIG. 1A, the inventive spin-current switched magnetic memoryelement 100 includes a plurality of magnetic layers 121, 122 includingat least one layer having a perpendicular magnetic anisotropy componentand including a current-switchable magnetic moment, and at least onebarrier layer 125 formed adjacent to the plurality of magnetic layers(e.g., between two of the magnetic layers).

The barrier layer 125 may include a tunneling barrier layer which isformed between two magnetic layers 121, 122. That is, the inventivespin-current switched magnetic memory element may include a magnetictunneling junction.

As illustrated in FIG. 1B, the spin-current switched magnetic memoryelement 100 may be formed on a substrate 110 (e.g., semiconductorsubstrate). Further, the spin-current switched magnetic memory element100 may include a first lead 130 (e.g., a bottom electrode), and asecond lead 140 (e.g., top electrode).

Further, at least one of the plurality of magnetic layers 121, 122 maybe included as part of a pillar (e.g., a thin film stack having lateraldimensions on the order of 100 nm) 150 formed between the first andsecond leads 130, 140. For example, as illustrated in FIG. 1C, all ofthe magnetic layers 121, 122 may be included in the pillar 150. However,some (e.g., all but one) of the plurality of magnetic layers may beformed outside of the pillar. For example, as shown in FIG. 1D, magneticlayer 122 is formed in the pillar 150, but magnetic layer 121 is notformed in the pillar. Further, a magnetic layer not included in thepillar 150 may be formed as part of the first or second leads 130, 140.It should also be noted that the barrier layer 125 may or may not beformed in the pillar.

In one exemplary aspect (e.g., illustrated in FIG. 1B), the first lead(e.g., bottom contact electrode) 130 may be formed between the substrate110 and the pillar 150, and the second lead 140 (e.g., top contactelectrode) may be formed on a top surface of the plurality of layers andopposite to the bottom contact electrode. The space between bottom lead(element 130) and top lead (element 140) can be filled with aninsulating material (e.g., silicon dioxide). An electrical current(e.g., a current having a density of no more than about 10.sup.6A/cm.sup.2) flowing between the first and second leads 130, 140 viapillar 150 may cause a change in the magnetic moment (e.g.,magnetization direction) of one of the plurality of magnetic layers(e.g., magnetic layer 122 in FIGS. 1B-1F).

The present invention proposes a general concept, and a set of specificapproaches, to the reduction of the switching current in a magneticmemory element. An important concept of the present invention is toutilize the perpendicular magnetic anisotropy component observed in somemagnetic thin films to counter-balance the strong demagnetization effect4.pi.M.sub.s, thus removing the main barrier for current-inducedmagnetic reversal, and reduce the switching current threshold.

A quantitative relationship may be established, both theoretically andwith some recent experimental verification, that a threshold current forspin-current induced switching can be expressed as follows:I _(c)=(1/0)(2e/h)a(a ² l _(m) M _(s))[H _(k) +H _(a)+(4πM _(s) −H_(p)/2]Where 0 is the spin-polarization factor of the current, e is electroncharge, h=h/2π is the normalized Planck constant, a is the magneticdamping coefficient, l_(m) is the film thickness for the switchingelement layer, a² is the film area (e.g., lateral size squared), M_(s)is the saturation magnetization, H_(k) is the uniaxial anisotropy fielddue to the elongated pillar cross-section, and Hp is the perpendicularanisotropy field induced either at the interface (such as for the caseof Co—Pt interface) or through epitaxy with its strain field (such asthe case of Ni epitaxially grown on copper (110) surface) or intrinsiccrystalline anisotropy of the material. The term (a²l_(m)M_(s)) (H_(k))represents the uniaxial anistropy energy of the switching element (e.g.,for a blocking temperature T_(b) which reflects the thermal-stabilitylimit for information storage), 4πM_(s) is the easy-plane shapeanistropy and H_(a) is the applied field. Further explanation formaterial perpendicular anisotropy field H_(p) is given below.

For most magnetic thin films of interest for magnetic memoryapplications, the demagnetization term 4πM_(s) would be large comparedto H_(k). For cobalt, for example, the term is on the order of 16,000Oe, whereas H_(k) is usually less than 1,000 Oe. Ordinarily, the 4πM_(s)term is the main factor in controlling the switching current. Thedemagnetization energy is an easy-plane anisotropy, which is aconsequence of the flat geometry of a thin film nanomagnet.

The exemplary aspects of the present invention use the additionalmaterials and/or interface perpendicular magnetic anisotropy energy(whose effect is represented by H_(p) in the above formula), as a meansto counter this force. Specifically, the present invention may reducethe combined perpendicular anisotropy to a value (e.g., a minimum value)that is convenient for a spin-current induced switch.

Specifically, the exemplary aspects of the present invention may utilizetwo classes of possible mechanisms for perpendicular magneticanisotropy. One class originates from interface electronic interaction,the other class from bulk structural (e.g., strain) modulation in theplurality of magnetic layers (e.g., strain in a thin film nanomagnet).

A specific example belonging to the first class of mechanisms is theinterface-induced perpendicular magnetic anisotropy in thin films (e.g.,cobalt-gold films). It has been demonstrated experimentally thatultra-thin Pt/Co/Pt and Au/Co/Au films exhibit perpendicular anisotropylarge enough to completely overcome the thin film demagnetization fieldof cobalt. It has been further demonstrated experimentally that one canplace two layers of such materials adjacent to each other with differentperpendicular switching field strength.

Thus, referring again to FIGS. 1A-1F, the spin-current switched magneticmemory element may include two magnetic layers 121, 122 separated by abarrier layer 125. For example, the magnetic layers 121, 122 may includecobalt, platinum, gold, copper and nickel layers. Further, the barrierlayer (e.g., tunneling barrier) 125 may include aluminum oxide ormagnesium oxide. The magnetic layers and barrier layer may be depositedepitaxially (e.g., on a single-crystal substrate).

As illustrated in FIGS. 1B-1F, the barrier layer 125 and at least one ofthe magnetic layers 121, 122 may be included in the lithographed pillar150 (e.g., an elongated cylinder-shaped pillar having a lateral sizeless than about 100 nm). The magnetization (e.g., magnetic moment) ofone magnetic layer (e.g., layer 122) may have a fixed orientation,whereas another magnetic layer (e.g., layer 121) may have a switchablemagnetization the direction which represents the information state.

In particular, a perpendicular magnetic anistropy may be included in themagnetic layer 122 which may have a magnitude sufficient to offset theeasy-plane demagnetization effect 4πM_(s) in magnetic layer 122. Thishelps to reduce the amount of current needed to change the magnetizationdirection of the magnetic layer 122. Further, incorporation of thebarrier layer (e.g., tunneling barrier layer) 125 adjacent to magneticlayer 122 suitable for spin-transfer switching helps to provide apractical signal voltage swing corresponding to the two differentmagnetic alignment states the adjacent magnetic layers have (e.g.parallel and antiparallel).

Other exemplary aspects are illustrated in FIGS. 1E-1F. For example, asillustrated in FIG. 1E, the memory element may include a first andsecond leads 130, 140, and a pillar 150 which includes magnetic layers121 formed adjacent to the leads 130, 140, barrier layers 125 formedadjacent to the magnetic layers 121, and a second magnetic layer 122formed between the barrier layers 125.

FIG. 1F illustrates a magnetic memory element which is similar to thatin FIG. 1E. However, the magnetic memory element of FIG. 1F does notinclude the magnetic layers 121 as part of the pillar 150. Instead, themagnetic layers 121 are formed as part of the first and second leads130, 140.

The magnetic layers of the spin-current switched magnetic memory elementmay include composite layers which may include, for example, a magneticlayer and a non-magnetic metal layer (e.g., cobalt and gold compositelayers, cobalt and platinum composite layers, etc.). In such a compositelayer, a perpendicular magnetic anisotropy component may be provided atan interface between layers (e.g., between a magnetic layer and anon-magnetic layer) in the composite magnetic layers. For example, FIGS.2A-2B illustrate a spin-current switched magnetic memory element 200having composite magnetic layers 121, 122.

Specifically, FIG. 2A illustrates a magnetic memory element 200 havingfirst and second leads 130, 140, and a first composite magnetic layer121 including a layer of cobalt formed on a layer of platinum, a barrierlayer (e.g., tunneling barrier layer) 125 formed on the first compositelayer 121, and a second composite layer 122 including a layer ofplatinum formed on a layer of cobalt, which is formed on the barrierlayer 125.

FIG. 2B illustrates another aspect in which the magnetic memory element200 having first and second leads 130, 140, and a first compositemagnetic layer 121 including a layer of cobalt formed on a layer ofgold, a barrier layer (e.g., tunneling barrier layer) 125 formed on thefirst composite layer 121, and a second composite layer 122 including alayer of gold formed on a layer of cobalt, which is formed on thebarrier layer 125.

The composite magnetic layers may have a form and function as describedabove with respect to magnetic layers 121, 122 in FIGS. 1A-1F. Forexample, the composite layers may be included as part of the pillar 150or lead 130, 140, as noted above.

To demonstrate the feasibility of using an interface-originatedperpendicular magnetic anisotropy component to control the magneticswitching field, FIG. 3 illustrates the magnetic rotation as indicatedby polar Kerr signal of a Pt—Co—Pt—Co layer structure. Specifically,FIG. 3 provides a graph plotting magnetic rotation (as measured by polarKerr signal which is sensitive to the perpendicular component of themagnetization) corresponding to the reversal of the perpendicularmagnetizations in the two cobalt layers according to an exemplary aspectof the present invention.

In the example of FIG. 3, the plurality of layers (in this experimentextended rather than confined within a pillar) includes a platinum layerhaving a thickness of 100 Å, a cobalt layer having a thickness of 5 Å, aplatinum layer having a thickness of 10 Å, a second cobalt layer havinga thickness of 15 Å, and a gold layer having a thickness of 50 Å. Asindicated by the graph in FIG. 3, such structures can be engineered tohave separate switching fields (switching field 310 or the higher value,corresponding to the thinner cobalt layer, and switching field 320, thelower field, corresponding to the thicker cobalt layer. Field is appliedperpendicular to the film surface in this experiment. Only the highervalue, ranging from 6000 to 10000 Oe represents a perpendicularanisotropy attainable in a pillar.). The same layer design can beapplied to the fabrication of a current-perpendicular spin-valve-type ofmagnetic junction, and with the perpendicular anisotropy componentengineered to reduce switching current I_(c).

Another exemplary aspect of the present invention is illustrated in FIG.4. Unlike the memory element 200 illustrated in FIGS. 2A-2B in which theperpendicular magnetic anistropy may be formed at an interface betweenlayers in the composite magnetic layers, the spin-current switchedmagnetic memory element 400 may include a bulk perpendicular magneticanisotropy component in at least one of the magnetic layers.

For example, the spin-current switched magnetic memory element 400 mayinclude first and second leads 430, 440, a first composite magneticlayer 421 including a nickel layer formed on a copper layer, a barrierlayer (e.g., tunneling barrier layer) 425 and a second composite layer422 including a copper layer formed on a nickel layer. Specifically, inthis exemplary aspect, the layers may be formed in this sequence (e.g.,or the reverse sequence): a first magnetic layer 421 including a copperlayer (e.g., epitaxial Cu(001)) and a first nickel layer Ni, a tunnelingbarrier layer 425 (e.g., Magnesium oxide), and a second magnetic layer422 including a second nickel layer Ni, and a second copper layer. Thus,this structure of the plurality of layers may be identified as(001)Cu/Ni(a)/Mg0/Ni(b)/Cu(001).

In this exemplary aspect, the first nickel layer included in compositemagnetic layer 421 is under a strain and has a perpendicular magneticanisotropy component. Further, the first copper layer (e.g., epitaxialCu(001)) included in composite magnetic layer 421 may also be strained,however the strain is mostly a reaction to the first nickel layer inlayer 421. In addition, the copper layer in composite layer 421 could bestrained further by selecting a different substrate.

The second magnetic layer 422 is the “fixed” layer. This layer may ormay not need to have perpendicular anisotropy component, depending uponthe final magnetic anisotropy component achieved in the first magneticlayer 421.

The electric resistance of the spin-current switched magnetic memoryelement (e.g., the pillar of layers) may depend on the magnetizationdirection of the first nickel layer Ni in the composite layer 421 byvirtue of the tunneling magnetoresistance phenomenon. Because themagnetic anisotropy of nickel in this structure is nearly uniaxial, theelectric current needed for spin-transfer (e.g., “spin-injectioncurrent”) switching is much lower than that known experimentally forswitching in-plane oriented magnetic moments.

This exemplary aspect is different from the aspect discussed above andillustrated, for example, in FIGS. 2A-2B, which may include, forexample, a multilayer incorporating cobalt and gold, or cobalt andplatinum (e.g., Co/Au or Co/Pt). In that earlier aspect, theperpendicular magnetic anisotropy component is an interface effect and,therefore, to maintain a reasonably strong perpendicular anisotropyfield for the entire magnetic layer, the magnetic layer (e.g. Cobalt)may have its thickness limited to just a few atomic layers.

In this exemplary aspect of the present invention, on the other hand,the anisotropy is caused by magnetoelastic effects in the bulk.Therefore, the magnetic layers (e.g. Nickel) can be thicker, up to 12 nm(for nickel for example), and the amount of effective anisotropy is lesssensitive to roughness of interfaces.

In most commonly used magnetic memory elements, the resting directions(or the easy-axis) of both the switching magnet (the “free” layer) andthe reference magnet (the “fixed” or “pinned” layer) are collinear. Thatis, the free layer is either parallel or antiparallel to the fixed layerin its magnetization, representing the two binary logic states of zeroor one.

In all exemplary structures discussed above, the perpendicularanisotropy component introduced through either interface or bulk straincan, but does not need to, completely overcome theshape-anisotropy-induced easy-plane magnetic anisotropy. That is, H_(p)needs to be close to but does not have to exceed, 4πM_(s). WhenH_(p)>4πM, the nanomagnet layer responsible for switching (e.g., the“free” layer) will have its stable magnetization direction perpendicularto the thin film surface, either pointing up or down, representing the 0and 1 state of information.

In this case, the fixed, or reference layers of magnetic thin film(s)should be engineered to have its (their) magnetization resting in theperpendicular direction as well so as to provide the correct referencedirection, both for writing and for reading the magnetic bit. Thisgeometry may have superior magnetic stability over arrangements wherethe thin film magnetization stays within the thin film plane.

However, it is often non-trivial to engineer more than one magnetic thinfilm in the stack to have a perpendicular magnetic anisotropy componentstrong enough to overcome the demagnetization. This is particularly soif the perpendicular anisotropy component originates from a strainedthin film state which may require epitaxial growth as shown in theexample associated with FIG. 4. If such is the case, it may be simplerand easier to engineer the perpendicular anisotropy component in the“free” layer to be just below that of the demagnetization field 4πM_(s).That is, to have Hp≦4πM_(s), so that 4πM_(s)−H_(p)˜H_(k). This way, the“free” layer's magnetization will still rest within the thin film plane,but it will be allowed to rotate out of the thin film plane uponspin-current excitation.

Since the resting position of the “free” layer remains within the thinfilm plane, the reference magnetic layer also need only have itsmagnetization resting within the thin film plane. This way, one is ableto avoid the difficult task of trying to engineer a structure where thefixed magnetic layer would also have to have its magnetization restperpendicular to the film surface. This will significantly lower thecomplexity of device materials engineering, making the implementation ofthe device design illustrated in FIG. 4 relatively straight-forward.

It is important to note that in any of the above-discussed aspects ofthe present invention (e.g., FIGS. 1A-4), the incorporation of thetunneling barrier into the plurality of layers (e.g., pillar) suitablefor spin-transfer switching helps to provide a practical signal voltage.Such combination of a tunnel barrier and spin-transfer switch has notbeen successfully attempted because in conventional devices the largeswitching current needed for in-plane switching exceeds the maximumjunction current and this will destroy the junction.

The current needed for switching of nanomagnets without strongeasy-plane demagnetization field (as discussed above) will be muchsmaller (e.g., less than about 10⁶ A/cm²) in the present invention. Inaddition, recent progress in junction fabrication has improved themaximum allowed junction current quite significantly (e.g., well above10⁶ A/cm²). Therefore, the present invention (e.g., device) will switchnondestructively. Specifically, the magnetic memory element according tothe present invention, may include a magnetic tunneling junction whichis formed with two magnetic layers separated by a tunneling barrier.Thus, the inventive spin-current switched magnetic memory element mayinclude a magnetic tunneling junction-based spin-injection switch.

As noted above, there is an intense search for a current-switchablemagnetic tunneling based device for memory applications. However, todate no clear demonstration has been made that such spin-transfer-basedmagnetic switching exists in magnetic tunneling junctions because thebreak-down current density is too low in conventional magnetic tunnelingdevices, typically below 10⁵ A/cm²

These limitations have been removed by the rapid technologicaldevelopment by the read-head engineering effort in search forlow-impedance magnetic tunneling junctions. For example, recently therehave been multiple credible reports that break-down current densities inexcess of 3×10⁶ A/cm² can be achieved with the current-generationlow-impedance magnetic tunneling junctions (e.g., with resistance area(RA) of about 2 Ohms-micron²).

The successful demonstration of magnetic tunneling junctions with aperpendicular magnetic anisotropy has also been recently reported. Inthese reports, researchers reported succeeding in the fabrication ofPt|Co|AlOx|Co| magnetic tunneling junctions, where the Pt|Co layer canbe conditioned to retain a perpendicular magnetic anisotropy dependingupon optimal barrier oxidation.

The reported structure, however, merely demonstrates the successfulcombination of a perpendicular anistropy materials system (Pt/Co) withthat of a tunneling barrier. The present invention, on the other hand,may include the construction of a device with lateral dimensions lessthan 100 nm (e.g., important to switching under spin-transfer) and witha tunnel barrier capable of supporting a current density which isgreater than 3×10⁶ A/cm² so as to be used as a current-controlledmagnetic switch.

In the present invention, a magnetic thin film system with aperpendicular anisotropy component will remove the large demagnetizationfield, and result in a reduction of injection spin-current density by atleast an order of magnitude, as discussed above. This brings the valueto within the demonstrated current density of about 3×10⁶ A/cm², henceenabling the fabrication of a tunneling-based spin-injection device.

To date, all spin-current-switchable junctions have been fabricatedusing a non-magnetic metal separation layer (e.g., a Co—Cu—Cocurrent-perpendicular spin valve). Such devices have very lowimpedances, typically on the order of 1-10 Ohms for device structuresaround 0.05 to 0.1 microns in lateral size. Such low impedance and therelatively small amount of magnetoresistance (on the order of 3-6%)means the usable signal is too weak for high-speed read-out in aconventional CMOS circuit.

A tunneling-based spin-injection switch will have larger deviceimpedance, as well as a larger signal output to properly match into theread circuit for magnetic random access memory (MRAM). In fact, magnetictunneling junction is by and large what enabled the current-generationMRAM architecture.

A magnetic tunneling switch will enable the further scaling of MRAM downto below 30 nm in junction size, and allow for superiorwrite-disturbance characteristics compared to the designs ofconventional magnetic memory devices. This represents a majoropportunity for the advance of MRAM technology.

Furthermore, a two-terminal bi-stable magnetic switch with relativelyhigh impedance and signal level is, from a circuit's perspective, verysimilar to other types of memory elements (e.g., ovonic unified memory(OUM) type, perovskite resistive memory, etc.) that are currently beingdeveloped. The present invention has all the advantages of speed andnonvolatility MRAM has to offer, and at the same time is compatible withthe circuit architecture of the other types of two-terminalresistive-switching memories, making it a much a broad-based memoryelement technology for future generations of MRAM and for systemintegration.

By tuning the thicknesses of the magnetic layers (e.g., in FIGS. 2A-2B,the thicknesses of the cobalt layers may range from about 3-4 angstromsupwards to about 10 angstroms), the present invention is able to obtaindifferent perpendicular anisotropy fields for the magnetic layersadjacent to the tunneling barrier layer (e.g., the top magnetic layerand the bottom magnetic layer). This will give a unique switchingthreshold current for the weaker of the two magnetic layers to beswitched by current injection across the tunneling barrier layer. Thetunneling barrier layer may include AlOx, or other, more advancedbarrier materials such as MgO.

The present invention may also include different types of materials witha perpendicular anisotropy component. For example, the tunneling barrierlayer may be formed between composite magnetic layers including platinumand cobalt (e.g., thin platinum and cobalt layers), or compositemagnetic layers formed of nickel and copper (e.g., the nickel and copperlayers may have a combined thickness which is greater than the combinedthickness of the platinum and cobalt layers), respectively. This wouldachieve the differentiation of anisotropy energies between the twomagnetic layers to provide a uniquely defined switching current formagnetic reversal.

While the thinner of the two magnetic layers can derive itsperpendicular anisotropy component from interface effects, a thickerlayer of ferromagnet (e.g., a thick nickel layer) can obtain itsperpendicular anisotropy component from other mechanisms such as strain(e.g., as in the case of the nickel and copper layers), thus achievingindependent control over the magnetic anisotropies of the two layers.

Another exemplary aspect of the present invention includes a method offabricating a spin-current switched magnetic memory element. The methodmay include, for example, forming a plurality of magnetic layers, atleast one of the plurality of magnetic layers having a perpendicularmagnetic anisotropy component and including a current-switchablemagnetic moment, and forming at least one barrier layer adjacent to atleast one layer in the plurality of magnetic layers. The inventivemethod may include all of the features and functions described abovewith respect to the inventive spin-current switched magnetic memoryelement.

FIG. 5 illustrates an exemplary aspect of the method of fabricating aspin-current switched magnetic memory element according to the exemplaryaspects of the present invention. As illustrated in FIG. 5, the method500 of fabricating a spin-current switched magnetic memory elementincludes providing (510) a wafer having a bottom electrode formedthereon, forming (520) a plurality of layers, the plurality of layersincluding a plurality of magnetic layers, at least one of the pluralityof magnetic layers having a perpendicular magnetic anisotropy componentand including a current-switchable magnetic moment, and at least onebarrier layer formed adjacent to said plurality of magnetic layers,lithographically defining (530) a pillar structure from the plurality oflayers, and forming (540) a top electrode on said pillar structure.

It should be noted that the barrier layer(s) may be formed during theformation of the plurality of magnetic layers. For example, the methodmay include forming a first magnetic layer, forming a barrier layer onthe first magnetic layer, and forming a second magnetic layer on thebarrier layer. Another barrier layer may then be formed on the secondmagnetic layer, and so on.

In summary, the present invention utilizes at least three importantconcepts. First, the use of perpendicular anisotropy materials, eitherPt|Co|TB|Co|Pt or |Cu|Ni|TB|Ni|Cu (e.g., where TB is a tunnelingbarrier) can lower the switching current, to below 10⁶ A/cm². Inaddition, a modern magnetic tunnel junction with AlOx or MgO barrier hasbeen refined to have break-down currents above 3×10⁶ A/cm². The novelcombination of these two factors yields a new and novel device structurewhich may include a current-switchable magnetic tunneling junction.

The present invention also utilizes the concepts of different types ofmagnetic anisotropies. For example, a uniaxial anisotropy (H_(k)) isusually in a direction in the film plane, and is quite often defined bya thin film's elongated shape in the plane (hence, a pillar includingthe thin film is usually not “cylindrical”). H_(k) may be considered the“good” anisotropy, since it may define the bit direction and stability.

On the other hand, the term 4πM_(s) may be considered the “bad”anisotropy since it increases switching current for no apparent benefit.The use of perpendicular anisotropy, either interface or bulk, to“nearly” balance out the effect of 4πM_(s) includes two possiblesituations. One possibility is with the magnetization resting in thedirection perpendicular to the film surface, the other with the momentstill lying in the film plane but it would be very easy to rotate it outof the plane. Both can be used for the present invention, although thesecond type (e.g., in-plane but easy to rotate out) is the easiest topractically implement, since it only uses one (e.g., the bottom, or the“free” magnetic layer, such as layer 121 in FIG. 1) ferromagnetic layerto have perpendicular anisotropy engineered into it, while the top, orthe “fixed” ferromagnetic layer (such as element 122 in FIG. 1), neednot to be magnetized in the perpendicular direction at all.

With its unique and novel features, the present invention provides aspin-current switched magnetic memory element having a switching currentthreshold which is significantly lower than that of conventional memoryelements, and a method of fabricating the device.

While the invention has been described in terms of one or more exemplaryembodiments, those skilled in the art will recognize that the inventioncan be practiced with modification within the spirit and scope of theappended claims. Specifically, one of ordinary skill in the art willunderstand that the drawings herein are meant to be illustrative, andthe design of the inventive assembly is not limited to that disclosedherein but may be modified within the spirit and scope of the presentinvention.

Further, Applicant's intent is to encompass the equivalents of all claimelements, and no amendment to any claim the present application shouldbe construed as a disclaimer of any interest in or right to anequivalent of any element or feature of the amended claim.

What is claimed is:
 1. A method of fabricating a spin-current switchedmagnetic memory element, said method comprising: providing a waferhaving a bottom electrode; forming a plurality of layers, such thatinterfaces between said plurality of layers are formed in situ, saidplurality of layers comprising: a plurality of magnetic layers, at leastone of said plurality of magnetic layers possessing a perpendicularmagnetic anisotropy component and comprising a spin-current-switchablemagnetic moment; and at least one barrier layer formed adjacent to saidplurality of magnetic layers; lithographically defining a pillarstructure from said plurality of layers; and forming a top electrode onsaid pillar structure.
 2. The method according to claim 1, wherein saidat least one barrier layer comprises a plurality of barrier layers whichare alternately formed with said plurality of magnetic layers.
 3. Aspin-current switched magnetic memory element, comprising: first andsecond leads; a pillar formed between said first and second leads; aplurality of magnetic layers, at least one of said plurality of magneticlayers possessing a perpendicular magnetic anisotropy component andcomprising a spin-current-switchable magnetic moment, all magneticmoments in said magnetic layers being substantially collinear in a reststate; and at least one barrier layer formed in said pillar adjacent tosaid plurality of magnetic layers.
 4. A magnetic random access memory(MRAM) array comprising a plurality of magnetic spin-current switchedmagnetic memory elements according to claim
 3. 5. The spin-currentswitched magnetic memory element according to claim 3, wherein saidperpendicular magnetic anistropy component has a magnitude sufficient toat least substantially offset an easy-plane demagnetization effect. 6.The spin-current switched magnetic memory element according to claim 5,wherein a magnetic moment of one of said plurality of magnetic layers ismost efficiently excitable or switchable under spin current excitation.7. The method according to claim 1, wherein said perpendicular magneticanistropy component has a magnitude sufficient to at least substantiallyoffset an easy-plane demagnetization effect, such that a magnetic momentof one of said plurality of magnetic layers comprises resting out of thelayer plane and is most efficiently excitable or switchable under spincurrent excitation.
 8. The method according to claim 1, wherein saidperpendicular magnetic anistropy component has a magnitude sufficient toat least substantially offset an easy-plane demagnetization effect. 9.The method according to claim 8, wherein a magnetic moment of one ofsaid plurality of magnetic layers is resting out of the layer plane. 10.The method according to claim 8, wherein a magnetic moment of one ofsaid plurality of magnetic layers is most efficiently excitable orswitchable under spin current excitation.
 11. The method according toclaim 1, wherein a magnetic moment of one of said plurality of magneticlayers comprises one of resting out of the layer plane and is mostefficiently excitable or switchable under spin current excitation.